Void formation and dust cloud structure in (a)symmetric RF discharges

W.J. Goedheer, M.R. Akdim, V. Land

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

The behaviour of dust particles in a discharge is the result of the concerted action of the charging process and forces like gravity, the ion and neutral drag force, and the thermophoretic force. Since the ion drag force plays a major role, the reactor geometry and the ion density profile are important parameters. In this paper we study the influence of the geometrical features of a radio-frequency discharge, such as asymmetry, ring electrodes, and a depression in the electrodes.

Original languageEnglish
Title of host publicationNew Vistas in Dusty Plasmas: Fourth International Conference on the Physics of Dusty Plasmas, 13-17 June 2005, Orleans, France
Place of PublicationNew York
PublisherAmerican Institute of Physics
Pages367-370
Number of pages4
ISBN (Print)0735402876, 9780735402874
DOIs
Publication statusPublished - 31 Oct 2005
Externally publishedYes
Event4th International Conference on the Physics of Dusty Plasmas - Orleans, France
Duration: 13 Jun 200517 Jun 2005

Publication series

NameAIP Conference Proceedings
Volume799

Conference

Conference4th International Conference on the Physics of Dusty Plasmas
CountryFrance
CityOrleans
Period13/06/0517/06/05

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