The research described here focusses on control design for planar production processes of repetitive structures consisting of identical features. The goal is to move the tool between arbitrary features with velocities of up to 1 m/s and with an accuracy in the order of 1-10 $\mu$m. The key idea in this work is to use a camera to directly measure the relative position between the tool and the feature. Moreover, we exploit feature based control, in which the position measurement is based on the interpolation of feature labels instead of their real physical distance.
|Title of host publication||29th Benelux Meeting on Systems and Control, 30 March - 1 April 2010, Heeze, Netherlands, book of abstracts|
|Place of Publication||Wageningen, Netherlands|
|Publication status||Published - 2010|