Vibrational and rotational excitation in a capacitively coupled 13.56 MHz radio frequency carbon tetrafluoride plasma studied by infrared absorption spectroscopy

M. Haverlag, F.J. Hoog, de, G.M.W. Kroesen

Research output: Contribution to journalArticleAcademicpeer-review

20 Citations (Scopus)
121 Downloads (Pure)

Fingerprint Dive into the research topics of 'Vibrational and rotational excitation in a capacitively coupled 13.56 MHz radio frequency carbon tetrafluoride plasma studied by infrared absorption spectroscopy'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy