Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R.M. Lemos Alvares Dos Santos; D. D'Agostino; F.M. Soares; H. Rabbani Haghighi; M.K. Smit; X.J.M. Leijtens

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R.M. Lemos Alvares Dos Santos
, D. D'Agostino
, F.M. Soares
, H. Rabbani Haghighi
, M.K. Smit
, X.J.M. Leijtens

Photonic Integration

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

Original language	English
Title of host publication	Conference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States
Pages	IM3A.3.-
Publication status	Published - 2014

Cite this

@inproceedings{a82c0de227d9499a8125ac237661b37d,

title = "Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits",

abstract = "This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.",

author = "\{Lemos Alvares Dos Santos\}, R.M. and D. D'Agostino and F.M. Soares and \{Rabbani Haghighi\}, H. and M.K. Smit and X.J.M. Leijtens",

year = "2014",

language = "English",

pages = "IM3A.3.--",

booktitle = "Conference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States",

}

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits. / Lemos Alvares Dos Santos, R.M.; D'Agostino, D.; Soares, F.M. et al.
Conference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States. 2014. p. IM3A.3.-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

AU - Lemos Alvares Dos Santos, R.M.

AU - D'Agostino, D.

AU - Soares, F.M.

AU - Rabbani Haghighi, H.

AU - Smit, M.K.

AU - Leijtens, X.J.M.

PY - 2014

Y1 - 2014

N2 - This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

AB - This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

M3 - Conference contribution

SP - IM3A.3.-

BT - Conference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States

ER -

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

Abstract

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