Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R. Santos; D. D'Agostino; F.M. Soares; H. Rabbani Haghighi; M.K. Smit; X.J.M. Leijtens

doi:10.1364/iprsn.2014.im3a.3

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R. Santos
, D. D'Agostino
, F.M. Soares
, H. Rabbani Haghighi
, M.K. Smit
, X.J.M. Leijtens

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

Original language	English
Title of host publication	Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014
Publisher	Optical Society of America (OSA)
Number of pages	3
ISBN (Print)	9781557527370
DOIs	https://doi.org/10.1364/iprsn.2014.im3a.3
Publication status	Published - 2014
Event	Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014 - San Diego, CA, United States Duration: 13 Jul 2014 → 17 Jul 2014

Conference

Conference	Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014
Abbreviated title	IPR '14
Country/Territory	United States
City	San Diego, CA
Period	13/07/14 → 17/07/14

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10.1364/iprsn.2014.im3a.3

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@inproceedings{124e3afb87e94639925592160ede9687,

title = "Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits",

abstract = "This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.",

author = "R. Santos and D. D'Agostino and F.M. Soares and \{Rabbani Haghighi\}, H. and M.K. Smit and X.J.M. Leijtens",

year = "2014",

doi = "10.1364/iprsn.2014.im3a.3",

language = "English",

isbn = "9781557527370",

booktitle = "Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014",

publisher = "Optical Society of America (OSA)",

address = "United States",

note = "Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014, IPR '14 ; Conference date: 13-07-2014 Through 17-07-2014",

}

Santos, R, D'Agostino, D, Soares, FM, Rabbani Haghighi, H, Smit, MK & Leijtens, XJM 2014, Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits. in Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014. Optical Society of America (OSA), Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014, San Diego, CA, United States, 13/07/14. https://doi.org/10.1364/iprsn.2014.im3a.3

TY - GEN

T1 - Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

AU - Santos, R.

AU - D'Agostino, D.

AU - Soares, F.M.

AU - Rabbani Haghighi, H.

AU - Smit, M.K.

AU - Leijtens, X.J.M.

PY - 2014

Y1 - 2014

N2 - This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

AB - This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.

UR - https://www.scopus.com/pages/publications/85085776232

U2 - 10.1364/iprsn.2014.im3a.3

DO - 10.1364/iprsn.2014.im3a.3

M3 - Conference contribution

AN - SCOPUS:85085776232

SN - 9781557527370

BT - Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014

PB - Optical Society of America (OSA)

T2 - Integrated Photonics Research, Silicon and Nanophotonics, IPRSN 2014

Y2 - 13 July 2014 through 17 July 2014

ER -

Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

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