Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R. Santos, B. Barcones Campo, M. K. Smit, X.J.M. Leijtens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

On-wafer probing of optical signals offers powerful means for assessing the fabrication process quality of photonic integrated circuits. We describe the fabrication and characterization of a vertical optical coupler that enables on-wafer probing.

Original languageEnglish
Title of host publicationPhotonic Networks and Devices, Networks 2013
Place of PublicationWashington
PublisherOptical Society of America (OSA)
Number of pages3
ISBN (Print)978-1-55752-981-7
DOIs
Publication statusPublished - 1 Dec 2013
EventPhotonic Networks and Devices, Networks 2013 - Rio Grande, Puerto Rico
Duration: 14 Jul 201317 Jul 2013

Conference

ConferencePhotonic Networks and Devices, Networks 2013
CountryPuerto Rico
CityRio Grande
Period14/07/1317/07/13

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