Vertical coupling mirror for on-wafer optical probing of photonic integrated circuits

R.M. Lemos Alvares Dos Santos, D. D'Agostino, F.M. Soares, H. Rabbani Haghighi, M.K. Smit, X.J.M. Leijtens

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.
Original languageEnglish
Title of host publicationConference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States
PagesIM3A.3.-
Publication statusPublished - 2014

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