This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.
|Title of host publication||Conference Paper Integrated Photonics Research, Silicon and Nanophotonics (IPR), 13-17 july 2014, San Diego, California United States|
|Publication status||Published - 2014|