Variable gains in motion control of wafer scanners

M.F. Heertjes

Variable gains in motion control of wafer scanners

M.F. Heertjes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 March 2015, Nagoya, Japan
Place of Publication	s.l.
Publisher	s.n.
Pages	1-8
Publication status	Published - 2015
Event	1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015) - Nagoya, Japan Duration: 9 Mar 2015 → 10 Mar 2015 Conference number: 1 http://www2.iee.or.jp/~diic/samcon/2015/index.html

Workshop

Workshop	1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015)
Abbreviated title	SAMCON 2015
Country/Territory	Japan
City	Nagoya
Period	9/03/15 → 10/03/15
Internet address	http://www2.iee.or.jp/~diic/samcon/2015/index.html

Cite this

@inproceedings{7ba81193e2ec48ecb81484234c2e81c9,

title = "Variable gains in motion control of wafer scanners",

author = "M.F. Heertjes",

year = "2015",

language = "English",

pages = "1--8",

booktitle = "Proceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 March 2015, Nagoya, Japan",

publisher = "s.n.",

note = "1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), SAMCON 2015 ; Conference date: 09-03-2015 Through 10-03-2015",

url = "http://www2.iee.or.jp/\textasciitilde{}diic/samcon/2015/index.html",

}

TY - GEN

T1 - Variable gains in motion control of wafer scanners

AU - Heertjes, M.F.

N1 - Conference code: 1

PY - 2015

Y1 - 2015

M3 - Conference contribution

SP - 1

EP - 8

BT - Proceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 March 2015, Nagoya, Japan

PB - s.n.

CY - s.l.

T2 - 1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015)

Y2 - 9 March 2015 through 10 March 2015

ER -