Variable gains in motion control of wafer scanners

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Original languageEnglish
Title of host publicationProceedings of the International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015), 9-10 March 2015, Nagoya, Japan
Place of Publications.l.
Publishers.n.
Pages1-8
Publication statusPublished - 2015
Event1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015) - Nagoya, Japan
Duration: 9 Mar 201510 Mar 2015
Conference number: 1
http://www2.iee.or.jp/~diic/samcon/2015/index.html

Workshop

Workshop1st IEEJ International Workshop on Sensing, Actuation, and Motion Control (SAMCON 2015)
Abbreviated titleSAMCON 2015
CountryJapan
CityNagoya
Period9/03/1510/03/15
Internet address

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