Variable gain motion control of wafer scanners

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
231 Downloads (Pure)
Original languageEnglish
Pages (from-to)90-100
Number of pages11
JournalIEEJ Transactions on Industry Applications
Volume5
Issue number2
DOIs
Publication statusPublished - 2016

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