Original language | English |
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Pages (from-to) | 90-100 |
Number of pages | 11 |
Journal | IEEJ Transactions on Industry Applications |
Volume | 5 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2016 |
Variable gain motion control of wafer scanners
Research output: Contribution to journal › Article › Academic › peer-review
11
Citations
(Scopus)
365
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