| Original language | English |
|---|---|
| Title of host publication | IEEE 45th IEEE Conference on Decision and Control |
| Place of Publication | United States, San Diego, CA |
| Pages | 3724-3729 |
| Publication status | Published - 2006 |
Variable Control Design and its Application to Wafer Scanners
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
5
Citations
(Scopus)