Variable Control Design and its Application to Wafer Scanners

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationIEEE 45th IEEE Conference on Decision and Control
Place of PublicationUnited States, San Diego, CA
Pages3724-3729
Publication statusPublished - 2006

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