UV photoannealing and RTP of thin sol-gel films

R. E. Van de Leest, F. Roozeboom

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)

Abstract

Various annealing methods for sol-gel films have been investigated. Thermal, photothermal, RTP and excimer laser annealing have been used to convert sol-gel precursor films into oxidic films. RTP annealing of sol-gel films yields better results than classical thermal annealing or excimer laser irradiation. Photochemical effects during RTP annealing contribute to obtain high-quality oxide films. The various annealing methods are illustrated by the annealing of alkoxide precursor films of tantalum, iron, nickel and yttrium.

Original languageEnglish
Title of host publication1996 MRS Spring Symposium
Place of PublicationWarrendale
PublisherMaterials Research Society
Pages193-201
Number of pages9
Publication statusPublished - 1 Dec 1996
Externally publishedYes
Event1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: 8 Apr 199612 Apr 1996

Publication series

NameMaterials Research Society Symposium - Proceedings
Volume429
ISSN (Print)0272-9172

Conference

Conference1996 MRS Spring Symposium
CitySan Francisco, CA, USA
Period8/04/9612/04/96

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