Unraveling the deposition mechanism in a-C:H thin-film growth : a molecular-dynamics study for the reaction behavior of C3 and C3H radicals with a-C:H surfaces

E. Neyts, A. Bogaerts, M.C.M. Sanden, van de

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)
107 Downloads (Pure)

Abstract

In this mol.-dynamics study, we present the simulated growth of thin a-C:H films using the Brenner [Phys. Rev. B 42, 9458 (1990)] potential. These simulations are relevant for the growth of thin films, grown using low-energy hydrocarbons. In this work, we investigate the reaction mechanisms of both the linear and the cyclic isomers of C3 and C3H on an a-C:H surface. We found that the cyclic species are always more reactive as compared to the linear species, due to their lower stability. The C3 species are found to be more reactive than the C3H species, due to steric hindrance of the H atom, shielding the C atom from the surface. The different mechanisms are discussed. The resulting film properties for different flux ratios of C3 and C3H have also been investigated. It is shown that films as deposited from C3 and C3H have a low d. and show low crosslinking. A clear change in microstructure is obsd. as the ratio between the cyclic and the linear species changes. These simulations provide insights into the reaction behavior of the investigated species, and how this influences the resulting film properties. [on SciFinder (R)]
Original languageEnglish
Article number014902
Pages (from-to)014902-1/8
Number of pages8
JournalJournal of Applied Physics
Volume99
Issue number1
DOIs
Publication statusPublished - 2006

Fingerprint Dive into the research topics of 'Unraveling the deposition mechanism in a-C:H thin-film growth : a molecular-dynamics study for the reaction behavior of C3 and C3H radicals with a-C:H surfaces'. Together they form a unique fingerprint.

Cite this