Uniform large-area slot-die coating of soluble metal oxide semiconductor towards mass production of high-performance TFT backplanes

Ilias Katsouras, Joris Maas, Jan Laurens van der Steen, Gerwin Gelinck, Ryo Takata, Marko Marinkovic, Anita Neumann, Duy Vu Pham, Ralf Anselmann, Tung Huei Ke, Steve Smout, Sarah Schols

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

ESL TFT backplane with solution type metal oxide semiconductor was completely processed on mass-production ready equipment. High mobility TFTs with excellent uniformity were obtained over the complete Gen1 glass substrate (320 mm × 352 mm), with good TFT bias stress reliability. An 85 ppi QVGA AMOLED display is demonstrated.

Original languageEnglish
Title of host publication23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016
PublisherSociety for Information Display
Pages81-84
Number of pages4
Volume1
ISBN (Electronic)9781510845510
Publication statusPublished - 1 Jan 2016
Event23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 - Fukuoka, Japan
Duration: 7 Dec 20169 Dec 2016

Conference

Conference23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016
CountryJapan
CityFukuoka
Period7/12/169/12/16

Keywords

  • AMOLED display
  • Mass production
  • Metal oxide semiconductor
  • Slot-die coating
  • Solution processable

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    Katsouras, I., Maas, J., van der Steen, J. L., Gelinck, G., Takata, R., Marinkovic, M., Neumann, A., Pham, D. V., Anselmann, R., Ke, T. H., Smout, S., & Schols, S. (2016). Uniform large-area slot-die coating of soluble metal oxide semiconductor towards mass production of high-performance TFT backplanes. In 23rd International Display Workshops in conjunction with Asia Display, IDW/AD 2016 (Vol. 1, pp. 81-84). Society for Information Display.