Understanding and controlling atomic layer deposition of platinum and platinum oxide

I.J.M. Erkens

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

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Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
Supervisors/Advisors
  • Kessels, W.M.M. (Erwin), Promotor
  • Roozeboom, Fred, Promotor
  • Verheijen, Marcel A., Copromotor
Award date1 Jul 2014
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-3644-3
DOIs
Publication statusPublished - 2014

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