Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

F. Roozeboom, W. Dekkers, K.B. Jinesh, J.H. Klootwijk, M.A. Verheijen, H.-D. Kim, D. Blin

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
EditorsW.M.M. Kessels, A. Delabie
Place of PublicationS.n.
Publication statusPublished - 2008

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