Original language | English |
---|---|
Title of host publication | Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) |
Editors | W.M.M. Kessels, A. Delabie |
Place of Publication | S.n. |
Publisher | s.n. |
Pages | MonA1-1- |
Publication status | Published - 2008 |
Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition
F. Roozeboom, W. Dekkers, K.B. Jinesh, J.H. Klootwijk, M.A. Verheijen, H.-D. Kim, D. Blin
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
2
Downloads
(Pure)