Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

F. Roozeboom; W. Dekkers; K.B. Jinesh; J.H. Klootwijk; M.A. Verheijen; H.-D. Kim; D. Blin

Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

F. Roozeboom, W. Dekkers, K.B. Jinesh, J.H. Klootwijk, M.A. Verheijen, H.-D. Kim, D. Blin

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Editors	W.M.M. Kessels, A. Delabie
Place of Publication	S.n.
Publisher	s.n.
Pages	MonA1-1-
Publication status	Published - 2008

Cite this

Roozeboom, F., Dekkers, W., Jinesh, K. B., Klootwijk, J. H., Verheijen, M. A., Kim, H-D., & Blin, D. (2008). Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. MonA1-1-). s.n..

Roozeboom, F. ; Dekkers, W. ; Jinesh, K.B. ; Klootwijk, J.H. ; Verheijen, M.A. ; Kim, H.-D. ; Blin, D. / Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition. Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). editor / W.M.M. Kessels ; A. Delabie. S.n. : s.n., 2008. pp. MonA1-1-

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title = "Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition",

author = "F. Roozeboom and W. Dekkers and K.B. Jinesh and J.H. Klootwijk and M.A. Verheijen and H.-D. Kim and D. Blin",

year = "2008",

language = "English",

pages = "MonA1--1--",

editor = "W.M.M. Kessels and A. Delabie",

booktitle = "Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)",

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Roozeboom, F, Dekkers, W, Jinesh, KB, Klootwijk, JH, Verheijen, MA, Kim, H-D & Blin, D 2008, Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition. in WMM Kessels & A Delabie (eds), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., pp. MonA1-1-.

Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition. / Roozeboom, F.; Dekkers, W.; Jinesh, K.B.; Klootwijk, J.H.; Verheijen, M.A.; Kim, H.-D.; Blin, D.

Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). ed. / W.M.M. Kessels; A. Delabie. S.n. : s.n., 2008. p. MonA1-1-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition

AU - Roozeboom, F.

AU - Dekkers, W.

AU - Jinesh, K.B.

AU - Klootwijk, J.H.

AU - Verheijen, M.A.

AU - Kim, H.-D.

AU - Blin, D.

PY - 2008

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M3 - Conference contribution

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BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -

Roozeboom F, Dekkers W, Jinesh KB, Klootwijk JH, Verheijen MA, Kim H-D et al. Ultrahigh-density trench decoupling capacitors comprising multiple MIM layer stacks grown by atomic layer deposition. In Kessels WMM, Delabie A, editors, Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). S.n.: s.n. 2008. p. MonA1-1-