Ultrafast laser processing of glass for MEMS and micro-fluidic applications

Y.J. Bellouard

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Abstract

An ultrafast laser processing of glass for MEMS and micro-fluidic application was presented in this paper. A low energy pulse, with an average power of 250 mW was used to write in the bulk microdevice contour along with the optical functions. The nature of the structural changes such as thermal conductivity changes was discussed in this paper from the view-point of laser processing of microdevices. New developments toward the integration of additional functionalities using ultra-fast laser exposure were also reviewed.
Original languageEnglish
Title of host publicationProceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference ( CLEO/Europe - EQEC 2009), , Munich, Germany
Place of PublicationPiscataway, NJ
PublisherInstitute of Electrical and Electronics Engineers
ISBN (Print)978-1-4244-4079-5
DOIs
Publication statusPublished - 2009
EventThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2009 - ICM Center of the New Munich Trade Fair Centre, Munich, Germany
Duration: 14 Jun 200919 Jun 2009
http://2009.cleoeurope.org/

Conference

ConferenceThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2009
Abbreviated titleCLEO®/Europe-EQEC 2009
CountryGermany
CityMunich
Period14/06/0919/06/09
Internet address

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    Bellouard, Y. J. (2009). Ultrafast laser processing of glass for MEMS and micro-fluidic applications. In Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference ( CLEO/Europe - EQEC 2009), , Munich, Germany Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-EQEC.2009.5192486