Abstract
An ultrafast laser processing of glass for MEMS and micro-fluidic application was presented in this paper. A low energy pulse, with an average power of 250 mW was used to write in the bulk microdevice contour along with the optical functions. The nature of the structural changes such as thermal conductivity changes was discussed in this paper from the view-point of laser processing of microdevices. New developments toward the integration of additional functionalities using ultra-fast laser exposure were also reviewed.
| Original language | English |
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| Title of host publication | Proceedings of the European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference ( CLEO/Europe - EQEC 2009), , Munich, Germany |
| Place of Publication | Piscataway, NJ |
| Publisher | Institute of Electrical and Electronics Engineers |
| ISBN (Print) | 978-1-4244-4079-5 |
| DOIs | |
| Publication status | Published - 2009 |
| Event | 2009 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2009 - ICM Center of the New Munich Trade Fair Centre, Munich, Germany Duration: 14 Jun 2009 → 19 Jun 2009 http://2009.cleoeurope.org/ |
Conference
| Conference | 2009 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2009 |
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| Abbreviated title | CLEO/Europe-EQEC 2009 |
| Country/Territory | Germany |
| City | Munich |
| Period | 14/06/09 → 19/06/09 |
| Other | CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference |
| Internet address |