Ultra-stretchable Interconnects for high-density stretchable electronics

S. Shafqat, J.P.M. Hoefnagels, Angel M. Savov, S. Joshi, R. Dekker, M.G.D. Geers

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)
111 Downloads (Pure)

Abstract

The exciting field of stretchable electronics (SE) promises numerous novel applications, particularly in-body and medical diagnostics devices. However, future advanced SE miniature devices will require high-density, extremely stretchable interconnects with micron-scale footprints, which calls for proven standardized (complementary metal-oxide semiconductor (CMOS)-type) process recipes using bulk integrated circuit (IC) microfabrication tools and fine-pitch photolithography patterning. Here, we address this combined challenge of microfabrication with extreme stretchability for high-density SE devices by introducing CMOS-enabled, free-standing, miniaturized interconnect structures that fully exploit their 3D kinematic freedom through an interplay of buckling, torsion, and bending to maximize stretchability. Integration with standard CMOS-type batch processing is assured by utilizing the Flex-to-Rigid (F2R) post-processing technology to make the back-end-of-line interconnect structures free-standing, thus enabling the routine microfabrication of highly-stretchable interconnects. The performance and reproducibility of these free-standing structures is promising: an elastic stretch beyond 2000% and ultimate (plastic) stretch beyond 3000%, with <0.3% resistance change, and >10 million cycles at 1000% stretch with <1% resistance change. This generic technology provides a new route to exciting highly-stretchable miniature devices.

Original languageEnglish
Article number277
Number of pages13
JournalMicromachines
Volume8
Issue number9
DOIs
Publication statusPublished - 13 Sep 2017

Keywords

  • Stretchable electronics
  • Ultra-stretchability
  • CMOS
  • Size-effects
  • Miniature interconnects
  • Microfabrication
  • Freestanding interconnects
  • Extreme stretchability
  • Microelectronics
  • High-density Microelectronics
  • Soft electronics
  • Soft robotics
  • Flexible electronics
  • Balloon catheter
  • Small-scale testing
  • Complementary metal-oxide semiconductor (CMOS) processing
  • Miniaturized interconnects
  • Mechanical size-effects

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