Abstract
ArF deep UV (193 nm) lithography was successfully applied to fabricate Arrayed Waveguide Gratings in generic Indium Phosphide technology. The sub-dB transmission losses demonstrate the advantages of scaling down the minimum feature size to 100 nm.
Original language | English |
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Title of host publication | 43rd European Conference on Optical Communication, ECOC 2017 |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 1-3 |
Number of pages | 3 |
ISBN (Electronic) | 978-1-5386-5624-2 |
ISBN (Print) | 978-1-5386-4993-0 |
DOIs | |
Publication status | Published - 24 Apr 2018 |
Event | 43rd European Conference on Optical Communications (ECOC 2017) - Gothenburg, Sweden Duration: 17 Sept 2017 → 21 Sept 2017 Conference number: 43 http://ecoc2017.org/ http://ecoc2017.org |
Conference
Conference | 43rd European Conference on Optical Communications (ECOC 2017) |
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Abbreviated title | ECOC 2017 |
Country/Territory | Sweden |
City | Gothenburg |
Period | 17/09/17 → 21/09/17 |
Other | The largest conference on optical communication in Europe and one of the largest and most prestigious events in this field worldwide. Held in Gothenburg, Sweden 17-21 September 2017. |
Internet address |