Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

R.J.H. Klein-Douwel; J.J.L. Spaanjaars; J.J. Meulen, ter

doi:10.1063/1.360186

Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

R.J.H. Klein-Douwel, J.J.L. Spaanjaars, J.J. Meulen, ter

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Abstract

Two-dimensional laser induced fluorescence measurements are applied tothe chemical vapor deposition of diamond by an oxyacetylene flame. Thefluorescence distributions of C₂, CH, and OH are measured forvarious deposition conditions. The influence of the temperature of themolybdenum substrate and the distance between the substrate and theflame front on the two-dimensional distributions and on the quality andmorphology of the deposited diamond is investigated. A relation isobserved between the C₂ distribution in the flame and thelocal growth rate and quality of the diamond layer, thereforeC₂ is thought to be an important species for diamond growth.The exact role of CH as a growth species is less clear; OH seems to beof minor importance. All measurements are performed during diamonddeposition.

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Original language	English
Pages (from-to)	2086-2096
Journal	Journal of Applied Physics
Volume	78
Issue number	3
DOIs	https://doi.org/10.1063/1.360186
Publication status	Published - 1995

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title = "Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence",

abstract = "Two-dimensional laser induced fluorescence measurements are applied tothe chemical vapor deposition of diamond by an oxyacetylene flame. Thefluorescence distributions of C2, CH, and OH are measured forvarious deposition conditions. The influence of the temperature of themolybdenum substrate and the distance between the substrate and theflame front on the two-dimensional distributions and on the quality andmorphology of the deposited diamond is investigated. A relation isobserved between the C2 distribution in the flame and thelocal growth rate and quality of the diamond layer, thereforeC2 is thought to be an important species for diamond growth.The exact role of CH as a growth species is less clear; OH seems to beof minor importance. All measurements are performed during diamonddeposition.Email me for a colour reprint.",

author = "R.J.H. Klein-Douwel and J.J.L. Spaanjaars and {Meulen, ter}, J.J.",

year = "1995",

doi = "10.1063/1.360186",

language = "English",

volume = "78",

pages = "2086--2096",

journal = "Journal of Applied Physics",

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publisher = "American Institute of Physics",

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T1 - Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

AU - Klein-Douwel, R.J.H.

AU - Spaanjaars, J.J.L.

AU - Meulen, ter, J.J.

PY - 1995

Y1 - 1995

N2 - Two-dimensional laser induced fluorescence measurements are applied tothe chemical vapor deposition of diamond by an oxyacetylene flame. Thefluorescence distributions of C2, CH, and OH are measured forvarious deposition conditions. The influence of the temperature of themolybdenum substrate and the distance between the substrate and theflame front on the two-dimensional distributions and on the quality andmorphology of the deposited diamond is investigated. A relation isobserved between the C2 distribution in the flame and thelocal growth rate and quality of the diamond layer, thereforeC2 is thought to be an important species for diamond growth.The exact role of CH as a growth species is less clear; OH seems to beof minor importance. All measurements are performed during diamonddeposition.Email me for a colour reprint.

AB - Two-dimensional laser induced fluorescence measurements are applied tothe chemical vapor deposition of diamond by an oxyacetylene flame. Thefluorescence distributions of C2, CH, and OH are measured forvarious deposition conditions. The influence of the temperature of themolybdenum substrate and the distance between the substrate and theflame front on the two-dimensional distributions and on the quality andmorphology of the deposited diamond is investigated. A relation isobserved between the C2 distribution in the flame and thelocal growth rate and quality of the diamond layer, thereforeC2 is thought to be an important species for diamond growth.The exact role of CH as a growth species is less clear; OH seems to beof minor importance. All measurements are performed during diamonddeposition.Email me for a colour reprint.

U2 - 10.1063/1.360186

DO - 10.1063/1.360186

M3 - Article

VL - 78

SP - 2086

EP - 2096

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 3

ER -

Two‐dimensional distributions of C2, CH, and OH in a diamond depositing oxyacetylene flame measured by laser induced fluorescence

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