Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam

G. ten Haaf, S.H.W. Wouters, T.C.H. Raadt, de, O.J. Luiten, P.H.A. Mutsaers, E.J.D. Vredenbregt

Research output: Contribution to conferencePosterAcademic

Abstract

Photo-ionization is applied to a laser cooled and compressed atomic rubidium
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.

Conference

Conference40th Annual Meeting of the section Atomic Molecular and Optical Physics
CountryNetherlands
CityLunteren
Period11/10/1612/10/16

Fingerprint

atomic beams
photoionization
brightness
ion beams
compressors
rubidium
lasers
integrated circuits
industries
laser beams
ionization
cavities
excitation
atoms
ions
energy

Cite this

ten Haaf, G., Wouters, S. H. W., Raadt, de, T. C. H., Luiten, O. J., Mutsaers, P. H. A., & Vredenbregt, E. J. D. (2016). Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam. 64-64. Poster session presented at 40th Annual Meeting of the section Atomic Molecular and Optical Physics, Lunteren, Netherlands.
ten Haaf, G. ; Wouters, S.H.W. ; Raadt, de, T.C.H. ; Luiten, O.J. ; Mutsaers, P.H.A. ; Vredenbregt, E.J.D./ Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam. Poster session presented at 40th Annual Meeting of the section Atomic Molecular and Optical Physics, Lunteren, Netherlands.1 p.
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title = "Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam",
abstract = "Photo-ionization is applied to a laser cooled and compressed atomic rubidiumbeam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinalrange in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.",
author = "{ten Haaf}, G. and S.H.W. Wouters and {Raadt, de}, T.C.H. and O.J. Luiten and P.H.A. Mutsaers and E.J.D. Vredenbregt",
year = "2016",
month = "10",
day = "11",
language = "English",
pages = "64--64",
note = "40th Annual Meeting of the section Atomic Molecular and Optical Physics ; Conference date: 11-10-2016 Through 12-10-2016",

}

ten Haaf, G, Wouters, SHW, Raadt, de, TCH, Luiten, OJ, Mutsaers, PHA & Vredenbregt, EJD 2016, 'Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam' 40th Annual Meeting of the section Atomic Molecular and Optical Physics, Lunteren, Netherlands, 11/10/16 - 12/10/16, pp. 64-64.

Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam. / ten Haaf, G.; Wouters, S.H.W.; Raadt, de, T.C.H.; Luiten, O.J.; Mutsaers, P.H.A.; Vredenbregt, E.J.D.

2016. 64-64 Poster session presented at 40th Annual Meeting of the section Atomic Molecular and Optical Physics, Lunteren, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam

AU - ten Haaf,G.

AU - Wouters,S.H.W.

AU - Raadt, de,T.C.H.

AU - Luiten,O.J.

AU - Mutsaers,P.H.A.

AU - Vredenbregt,E.J.D.

PY - 2016/10/11

Y1 - 2016/10/11

N2 - Photo-ionization is applied to a laser cooled and compressed atomic rubidiumbeam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinalrange in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.

AB - Photo-ionization is applied to a laser cooled and compressed atomic rubidiumbeam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinalrange in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.

M3 - Poster

SP - 64

EP - 64

ER -

ten Haaf G, Wouters SHW, Raadt, de TCH, Luiten OJ, Mutsaers PHA, Vredenbregt EJD. Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam. 2016. Poster session presented at 40th Annual Meeting of the section Atomic Molecular and Optical Physics, Lunteren, Netherlands.