Two step photo-ionization of a laser cooled and compressed thermal atomic beam for use in a focused ion beam

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Abstract

Photo-ionization is applied to a laser cooled and compressed atomic rubidium
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.
Original languageEnglish
Pages64-64
Number of pages1
Publication statusPublished - 11 Oct 2016
Event40th Annual Meeting of the section Atomic Molecular and Optical Physics - Conference Center De Werelt , Lunteren, Netherlands
Duration: 11 Oct 201612 Oct 2016
Conference number: 40

Conference

Conference40th Annual Meeting of the section Atomic Molecular and Optical Physics
CountryNetherlands
CityLunteren
Period11/10/1612/10/16

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