Abstract
Photo-ionization is applied to a laser cooled and compressed atomic rubidium
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.
beam in order to generate a high brightness ion beam. When focused, this ion beam can be used to image and edit integrated circuits at the nano-scale which is important for the ongoing reduction of feature sizes in the semiconductor industry. Experiments have shown that an atomic beam brightness in excess of 106 A/(m2 sr eV) can be achieved with a flux equivalent to 500 pA in a compact magneto-optical compressor which should be sufficient to generate ion spots of 1 nm. Currently, photo-ionization experiments are being carried out that aim at ionizing the majority of the atoms within a small longitudinal
range in order to minimize the longitudinal energy spread. The two step ionization setup uses a tightly focused excitation laser beam and a powerful blue laser coupled to a build-up-cavity.
| Original language | English |
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| Pages | 64-64 |
| Number of pages | 1 |
| Publication status | Published - 11 Oct 2016 |
| Event | 40th Annual Meeting of the section Atomic Molecular and Optical Physics - Conference Center De Werelt , Lunteren, Netherlands Duration: 11 Oct 2016 → 12 Oct 2016 Conference number: 40 |
Conference
| Conference | 40th Annual Meeting of the section Atomic Molecular and Optical Physics |
|---|---|
| Country/Territory | Netherlands |
| City | Lunteren |
| Period | 11/10/16 → 12/10/16 |