TY - JOUR
T1 - True atomic-scale imaging in three dimensions
T2 - a review of the rebirth of field-ion microscopy
AU - Vurpillot, F.
AU - Danoix, F.
AU - Gilbert, M.
AU - Koelling, S.
AU - Dagan, M.
AU - Seidman, D.N.
PY - 2017/4/1
Y1 - 2017/4/1
N2 - This article reviews recent advances utilizing field-ion microscopy (FIM) to extract atomic-scale three-dimensional images of materials. This capability is not new, as the first atomic-scale reconstructions of features utilizing FIM were demonstrated decades ago. The rise of atom probe tomography, and the application of this latter technique in place of FIM has unfortunately severely limited further FIM development. Currently, the ubiquitous availability of extensive computing power makes it possible to treat and reconstruct FIM data digitally and this development allows the image sequences obtained utilizing FIM to be extremely valuable for many material science and engineering applications. This article demonstrates different applications of these capabilities, focusing on its use in physical metallurgy and semiconductor science and technology.
AB - This article reviews recent advances utilizing field-ion microscopy (FIM) to extract atomic-scale three-dimensional images of materials. This capability is not new, as the first atomic-scale reconstructions of features utilizing FIM were demonstrated decades ago. The rise of atom probe tomography, and the application of this latter technique in place of FIM has unfortunately severely limited further FIM development. Currently, the ubiquitous availability of extensive computing power makes it possible to treat and reconstruct FIM data digitally and this development allows the image sequences obtained utilizing FIM to be extremely valuable for many material science and engineering applications. This article demonstrates different applications of these capabilities, focusing on its use in physical metallurgy and semiconductor science and technology.
KW - Field-ion microscopy
KW - point defects
KW - tomography
UR - http://www.scopus.com/inward/record.url?scp=85015988189&partnerID=8YFLogxK
U2 - 10.1017/S1431927617000198
DO - 10.1017/S1431927617000198
M3 - Article
C2 - 28337951
AN - SCOPUS:85015988189
SN - 1431-9276
VL - 23
SP - 210
EP - 220
JO - Microscopy and Microanalysis
JF - Microscopy and Microanalysis
IS - 2
ER -