Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD

M. Bouman; E. Langereis; J. Keijmel; W.M.M. Kessels; I. Lee; F. Zaera

Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD

M. Bouman
, E. Langereis
, J. Keijmel
, W.M.M. Kessels
, I. Lee
, F. Zaera

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
Editors	W.M.M. Kessels, A. Delabie
Place of Publication	S.n.
Publisher	s.n.
Pages	P-104-
Publication status	Published - 2008

Cite this

Bouman, M., Langereis, E., Keijmel, J., Kessels, W. M. M., Lee, I., & Zaera, F. (2008). Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. P-104-). s.n..

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title = "Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD",

author = "M. Bouman and E. Langereis and J. Keijmel and W.M.M. Kessels and I. Lee and F. Zaera",

year = "2008",

language = "English",

pages = "P--104--",

editor = "W.M.M. Kessels and A. Delabie",

booktitle = "Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)",

publisher = "s.n.",

}

Bouman, M, Langereis, E, Keijmel, J, Kessels, WMM, Lee, I & Zaera, F 2008, Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD. in WMM Kessels & A Delabie (eds), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). s.n., S.n., pp. P-104-.

Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD. / Bouman, M.; Langereis, E.; Keijmel, J. et al.
Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts). ed. / W.M.M. Kessels; A. Delabie. S.n.: s.n., 2008. p. P-104-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD

AU - Bouman, M.

AU - Langereis, E.

AU - Keijmel, J.

AU - Kessels, W.M.M.

AU - Lee, I.

AU - Zaera, F.

PY - 2008

Y1 - 2008

M3 - Conference contribution

SP - P-104-

BT - Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)

A2 - Kessels, W.M.M.

A2 - Delabie, A.

PB - s.n.

CY - S.n.

ER -