Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD

M. Bouman, E. Langereis, J. Keijmel, W.M.M. Kessels, I. Lee, F. Zaera

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
EditorsW.M.M. Kessels, A. Delabie
Place of PublicationS.n.
Publication statusPublished - 2008

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