Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD

M. Bouman, E. Langereis, J. Keijmel, W.M.M. Kessels, I. Lee, F. Zaera

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts)
EditorsW.M.M. Kessels, A. Delabie
Place of PublicationS.n.
Publishers.n.
PagesP-104-
Publication statusPublished - 2008

Cite this

Bouman, M., Langereis, E., Keijmel, J., Kessels, W. M. M., Lee, I., & Zaera, F. (2008). Transmission infrared spectroscopy to measure surface groups and reaction by-products during ALD. In W. M. M. Kessels, & A. Delabie (Eds.), Proceedings of the 8th International Conference on Atomic Layer Deposition (ALD 2008), June 29 - July 2008, Bruges, Belgium (Book of Abstracts) (pp. P-104-). s.n..