Transition in layer structure of atomic/molecular layer deposited ZnO-zincone multilayers

Janne Niemelä (Corresponding author), Morteza Aghaee, Erwin Kessels, Adriana Creatore, Marcel Verheijen

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
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In this work, atomic-resolution transmission electron microscopy studies show that in atomic/molecular layer deposited ZnO-zincone [(ZnO)a(Zn-O-C6H4-O)b] multilayer thin films, ZnO crystals grow vertically and continuously through lateral zincone monolayers. When the thickness of zincone is increased from one to few monolayers, the growth of the ZnO crystals becomes confined, leading to the formation of discrete ZnO/zincone interfaces accompanied by a decrease in roughness. Apart from providing understanding on the formation of interfaces and on the structure of hybrid multilayers, these findings are relevant, e.g., for understanding thermoelectric interface phenomena at inorganicorganic
interfaces and x-ray reflectometry of hybrid multilayer thin films.
Original languageEnglish
Article number040602
Number of pages4
JournalJournal of Vacuum Science and Technology A
Issue number4
Early online date31 May 2019
Publication statusPublished - 1 Jul 2019


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