Transient transport phenomena in high power impulse magnetron sputtering discharges

Research output: Thesis › Phd Thesis 4 Research NOT TU/e / Graduation NOT TU/e)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Ruhr-Universität Bochum
Supervisors/Advisors	von Keudell, Achim, Promotor Awakowicz, Peter, Copromotor, External person
Award date	24 Jun 2021
Place of Publication	Bochum
Publisher	Ruhr-University Bochum
DOIs	https://doi.org/10.13154/294-8326
Publication status	Published - 31 Aug 2021
Externally published	Yes

Access to Document

@phdthesis{5ac69b7d87b341ec8eeb040c0064496d,

title = "Transient transport phenomena in high power impulse magnetron sputtering discharges",

author = "Julian Held",

year = "2021",

month = aug,

day = "31",

doi = "10.13154/294-8326",

language = "English",

publisher = "Ruhr-University Bochum",

type = "Phd Thesis 4 Research NOT TU/e / Graduation NOT TU/e)",

school = "Ruhr-Universit{\"a}t Bochum",

}