Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

S. Kuiper; P.M.J. Hof, Van den; G. Schitter

doi:10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

S. Kuiper, P.M.J. Hof, Van den, G. Schitter

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

Abstract

In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

Original language	English
Title of host publication	Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria
Place of Publication	Piscataway
Publisher	Institute of Electrical and Electronics Engineers
Pages	888-893
ISBN (Print)	978-1-4577-1771-0
DOIs	https://doi.org/10.1109/I2MTC.2012.6229192
Publication status	Published - 2012
Event	2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012 - Graz, Austria Duration: 13 May 2012 → 16 May 2012

Conference

Conference	2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012
Abbreviated title	12MTC 2012
Country/Territory	Austria
City	Graz
Period	13/05/12 → 16/05/12

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10.1109/I2MTC.2012.6229192

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Kuiper, S., Hof, Van den, P. M. J., & Schitter, G. (2012). Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. In Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria (pp. 888-893). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/I2MTC.2012.6229192

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title = "Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy",

abstract = "In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.",

author = "S. Kuiper and {Hof, Van den}, P.M.J. and G. Schitter",

year = "2012",

doi = "10.1109/I2MTC.2012.6229192",

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booktitle = "Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria",

publisher = "Institute of Electrical and Electronics Engineers",

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note = "2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012, 12MTC 2012 ; Conference date: 13-05-2012 Through 16-05-2012",

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Kuiper, S, Hof, Van den, PMJ & Schitter, G 2012, Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. in Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Institute of Electrical and Electronics Engineers, Piscataway, pp. 888-893, 2012 IEEE International Instrumentation and Measurement Technology Conference, 12MTC 2012, Graz, Austria, 13/05/12. https://doi.org/10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. / Kuiper, S.; Hof, Van den, P.M.J.; Schitter, G.
Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Piscataway: Institute of Electrical and Electronics Engineers, 2012. p. 888-893.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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N2 - In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

AB - In Atomic Force Microscopy the force between the tip and the sample is controlled in a feedback loop in order to prevent damage to the tip and the sample during scanning, and also to convert the force measurement into an estimate of the sample topography. In this paper it is experimentally shown that within the design of the control system a direct trade-off has to be made between the bandwidth of the feedback loop and the accuracy of the topography estimation due to the dynamical uncertainty of the systems. Several method are suggested to reduce the dynamical uncertainty of the imaging system to allow both faster and more accurate AFM imaging. Moreover, a method is discussed and experimentally validated to compensate for the loss in imaging accuracy due to the hysteresis within the piezoelectric actuators.

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DO - 10.1109/I2MTC.2012.6229192

M3 - Conference contribution

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BT - Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria

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Kuiper S, Hof, Van den PMJ, Schitter G. Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy. In Proceedings of the 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 13-16 May 2012, Graz, Austria. Piscataway: Institute of Electrical and Electronics Engineers. 2012. p. 888-893 doi: 10.1109/I2MTC.2012.6229192

Trade-off between the control bandwidth and the measurement accuracy in Atomic Force Microscopy

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