Toward understanding wear particle generation on silicon wafers

Tom Bertens

Research output: Thesis › EngD Thesis

261 Downloads (Pure)

Original language	English
Awarding Institution	Mechanics of Materials
Supervisors/Advisors	Hoefnagels, Johan P.M., Supervisor Geers, Marc G.D., Committee member van den Broek, Kasper, External supervisor, External person
Thesis sponsors	VDL Group
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Publication status	Published - 30 Nov 2023

EngD thesis. - Confidential until 15-5-2024

Access to Document

@phdthesis{55e0fb0495154ff383b5082136edad48,

title = "Toward understanding wear particle generation on silicon wafers",

author = "Tom Bertens",

note = "EngD thesis. - Confidential until 15-5-2024",

year = "2023",

month = nov,

day = "30",

language = "English",

series = "EngD Thesis",

publisher = "Technische Universiteit Eindhoven",

type = "EngD Thesis",

school = "Mechanics of Materials",

}