Towards STEM control: Modeling framework and development of a sensor for defocus control

Arturo Tejada; Wouter Van den Broek; Saartje W. van der Hoeven; Arnold J. den Dekker

doi:10.1109/CDC.2009.5400416

Towards STEM control: Modeling framework and development of a sensor for defocus control

Arturo Tejada
, Wouter Van den Broek
, Saartje W. van der Hoeven
, Arnold J. den Dekker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)

Abstract

Scanning transmission electron microscopes are indispensable tools for material science research, since they can reveal the internal structure of a wide range of specimens. Thus, it is of scientific and industrial interest to transform these microscopes into flexible, high-throughput, unsupervised, nano-measuring tools. To do so, processes that are currently executed manually based on visual feedback (e.g., alignment or particle measurement) should be automated, taking into consideration their time dependencies. That is, these microscopes should be studied from the systems and control perspective. To the best of our knowledge, such perspective is lacking in the literature. Thus, it is provided here through a new modeling framework that facilitates the future development of control strategies based on image analysis. The progress made towards developing an image-based sensor for defocus control is also reported. Finally, the paper also aims to introduce scanning transmission electron microscopy as an important and untapped application area for control engineers.

Original language	English
Title of host publication	Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference
Publisher	Institute of Electrical and Electronics Engineers
Chapter	FrC09.5
Pages	8310-8315
Number of pages	6
ISBN (Print)	978-1-4244-3871-6
DOIs	https://doi.org/10.1109/CDC.2009.5400416
Publication status	Published - 29 Jan 2010
Externally published	Yes
Event	48th IEEE Conference on Decision and Control, CDC 2009 - "Shanghai International Convention Center", Shanghai, China Duration: 15 Dec 2009 → 18 Dec 2009 Conference number: 48

Conference

Conference	48th IEEE Conference on Decision and Control, CDC 2009
Abbreviated title	CDC 2009
Country/Territory	China
City	Shanghai
Period	15/12/09 → 18/12/09
Other	48th IEEE Conference on Decision and Control held jointly with 2009 28th Chinese Control Conference, CDC/CCC 2009

Access to Document

10.1109/CDC.2009.5400416

Cite this

Tejada, A., Van den Broek, W., van der Hoeven, S. W., & den Dekker, A. J. (2010). Towards STEM control: Modeling framework and development of a sensor for defocus control. In Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference (pp. 8310-8315). Article 5400416 Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CDC.2009.5400416

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title = "Towards STEM control: Modeling framework and development of a sensor for defocus control",

abstract = "Scanning transmission electron microscopes are indispensable tools for material science research, since they can reveal the internal structure of a wide range of specimens. Thus, it is of scientific and industrial interest to transform these microscopes into flexible, high-throughput, unsupervised, nano-measuring tools. To do so, processes that are currently executed manually based on visual feedback (e.g., alignment or particle measurement) should be automated, taking into consideration their time dependencies. That is, these microscopes should be studied from the systems and control perspective. To the best of our knowledge, such perspective is lacking in the literature. Thus, it is provided here through a new modeling framework that facilitates the future development of control strategies based on image analysis. The progress made towards developing an image-based sensor for defocus control is also reported. Finally, the paper also aims to introduce scanning transmission electron microscopy as an important and untapped application area for control engineers.",

author = "Arturo Tejada and \{Van den Broek\}, Wouter and \{van der Hoeven\}, \{Saartje W.\} and \{den Dekker\}, \{Arnold J.\}",

year = "2010",

month = jan,

day = "29",

doi = "10.1109/CDC.2009.5400416",

language = "English",

isbn = "978-1-4244-3871-6",

pages = "8310--8315",

booktitle = "Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference",

publisher = "Institute of Electrical and Electronics Engineers",

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note = "48th IEEE Conference on Decision and Control, CDC 2009, CDC 2009 ; Conference date: 15-12-2009 Through 18-12-2009",

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Tejada, A, Van den Broek, W, van der Hoeven, SW & den Dekker, AJ 2010, Towards STEM control: Modeling framework and development of a sensor for defocus control. in Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference., 5400416, Institute of Electrical and Electronics Engineers, pp. 8310-8315, 48th IEEE Conference on Decision and Control, CDC 2009, Shanghai, China, 15/12/09. https://doi.org/10.1109/CDC.2009.5400416

Towards STEM control: Modeling framework and development of a sensor for defocus control. / Tejada, Arturo; Van den Broek, Wouter; van der Hoeven, Saartje W. et al.
Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference. Institute of Electrical and Electronics Engineers, 2010. p. 8310-8315 5400416.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Towards STEM control

T2 - 48th IEEE Conference on Decision and Control, CDC 2009

AU - Tejada, Arturo

AU - Van den Broek, Wouter

AU - van der Hoeven, Saartje W.

AU - den Dekker, Arnold J.

N1 - Conference code: 48

PY - 2010/1/29

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N2 - Scanning transmission electron microscopes are indispensable tools for material science research, since they can reveal the internal structure of a wide range of specimens. Thus, it is of scientific and industrial interest to transform these microscopes into flexible, high-throughput, unsupervised, nano-measuring tools. To do so, processes that are currently executed manually based on visual feedback (e.g., alignment or particle measurement) should be automated, taking into consideration their time dependencies. That is, these microscopes should be studied from the systems and control perspective. To the best of our knowledge, such perspective is lacking in the literature. Thus, it is provided here through a new modeling framework that facilitates the future development of control strategies based on image analysis. The progress made towards developing an image-based sensor for defocus control is also reported. Finally, the paper also aims to introduce scanning transmission electron microscopy as an important and untapped application area for control engineers.

AB - Scanning transmission electron microscopes are indispensable tools for material science research, since they can reveal the internal structure of a wide range of specimens. Thus, it is of scientific and industrial interest to transform these microscopes into flexible, high-throughput, unsupervised, nano-measuring tools. To do so, processes that are currently executed manually based on visual feedback (e.g., alignment or particle measurement) should be automated, taking into consideration their time dependencies. That is, these microscopes should be studied from the systems and control perspective. To the best of our knowledge, such perspective is lacking in the literature. Thus, it is provided here through a new modeling framework that facilitates the future development of control strategies based on image analysis. The progress made towards developing an image-based sensor for defocus control is also reported. Finally, the paper also aims to introduce scanning transmission electron microscopy as an important and untapped application area for control engineers.

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SN - 978-1-4244-3871-6

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BT - Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference

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Tejada A, Van den Broek W, van der Hoeven SW, den Dekker AJ. Towards STEM control: Modeling framework and development of a sensor for defocus control. In Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference. Institute of Electrical and Electronics Engineers. 2010. p. 8310-8315. 5400416 doi: 10.1109/CDC.2009.5400416

Towards STEM control: Modeling framework and development of a sensor for defocus control

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