Towards self-consistent diffusion models in plasmas used for deposition

J.F.J. Janssen, J.L.G. Suijker, K.S.C. Peerenboom, J. van Dijk

Research output: Contribution to conferencePosterAcademic

Workshop

Workshop18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015)
Abbreviated titleWELTPP-18
CountryNetherlands
CityKerkrade
Period3/12/154/12/15
Internet address

Cite this

Janssen, J. F. J., Suijker, J. L. G., Peerenboom, K. S. C., & van Dijk, J. (2015). Towards self-consistent diffusion models in plasmas used for deposition. Poster session presented at 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), Kerkrade, Netherlands.
Janssen, J.F.J. ; Suijker, J.L.G. ; Peerenboom, K.S.C. ; van Dijk, J./ Towards self-consistent diffusion models in plasmas used for deposition. Poster session presented at 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), Kerkrade, Netherlands.
@conference{9672384b21104138a0c75332f6354e84,
title = "Towards self-consistent diffusion models in plasmas used for deposition",
author = "J.F.J. Janssen and J.L.G. Suijker and K.S.C. Peerenboom and {van Dijk}, J.",
year = "2015",
month = "12",
day = "3",
language = "English",
note = "18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), WELTPP-18 ; Conference date: 03-12-2015 Through 04-12-2015",
url = "http://phys.tue.nl/pmp/WELTPP/home/151001_ann_fin.pdf",

}

Janssen, JFJ, Suijker, JLG, Peerenboom, KSC & van Dijk, J 2015, 'Towards self-consistent diffusion models in plasmas used for deposition' 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), Kerkrade, Netherlands, 3/12/15 - 4/12/15, .

Towards self-consistent diffusion models in plasmas used for deposition. / Janssen, J.F.J.; Suijker, J.L.G.; Peerenboom, K.S.C.; van Dijk, J.

2015. Poster session presented at 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), Kerkrade, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Towards self-consistent diffusion models in plasmas used for deposition

AU - Janssen,J.F.J.

AU - Suijker,J.L.G.

AU - Peerenboom,K.S.C.

AU - van Dijk,J.

PY - 2015/12/3

Y1 - 2015/12/3

M3 - Poster

ER -

Janssen JFJ, Suijker JLG, Peerenboom KSC, van Dijk J. Towards self-consistent diffusion models in plasmas used for deposition. 2015. Poster session presented at 18th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2015), Kerkrade, Netherlands.