Towards robust multi-processor scheduling for high-end servo control

J.P.M. Voeten, S. Adyanthaya, R.R.H. Schiffelers, B.D. Theelen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


ASML is the world's leading provider of complex lithography systems for the semiconductor industry. Such systems consist of numerous servo control systems to control, for instance, the positioning of a 15 kg wafer positioning module in six degrees of freedom with nanometer accuracy at acceleration speeds exceeding 14G. Servo applications are scheduled on multi-processor platforms to satisfy real-time latency and throughput requirements. However because of execution time variations or communication contention, deadlines cannot always be met. A challenge is therefore to produce robust schedules that are able to tolerate these timing variations. Working towards such robust multi-processor schedulers is the topic of this session. The following key items will be addressed: • trends and challenges in high-end servo control for lithography systems; • fast multi-processor/multi-core scheduling of servo applications; • computational performance analysis vs simulation-based performance analysis – Scenario Aware Dataflow.
Original languageEnglish
Title of host publicationAdvanced School for Computing and Imaging (ASCI) Summer School, June 10, 2014, Soesterberg, The Netherlands
Publication statusPublished - 2014


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