Abstract
In Atomic Force Microscopy (AFM), the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage to the tip and sample during imaging, and to convert the measurement of the tip-sample force into an estimation of the sample topography. Dynamical uncertainties of the system pose a strong limitation on the achievable control bandwidth, and on the accuracy of the estimated topography. This contribution discusses an integrated approach to design a robust feedback controller and topography estimator, taking into account the dynamical uncertainties of the imaging system. It is shown that for a given AFM system there exist a direct trade-off between the achievable closed-loop bandwidth and the guaranteed bounds on the topography estimation error due to the dynamic uncertainties in the system.
| Original language | English |
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| Title of host publication | Proceedings of the 18th IFAC World Congress (IFAC 2011), 28 August - 2 September 2011, Milano, Italy |
| Editors | S. Bittanti, A. Cenedese, S. Zampieri |
| DOIs | |
| Publication status | Published - 2011 |
| Event | 18th World Congress of the International Federation of Automatic Control (IFAC 2011 World Congress) - Milano, Italy Duration: 28 Aug 2011 → 2 Sept 2011 Conference number: 18 http://www.ifac2011.org/ |
Conference
| Conference | 18th World Congress of the International Federation of Automatic Control (IFAC 2011 World Congress) |
|---|---|
| Abbreviated title | IFAC 2011 |
| Country/Territory | Italy |
| City | Milano |
| Period | 28/08/11 → 2/09/11 |
| Internet address |
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