Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography

Ruben Wouterus Henricus Merks

Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography

Ruben Wouterus Henricus Merks

Research output: Thesis › Phd Thesis 1 (Research TU/e / Graduation TU/e)

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Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Electrical Engineering
Supervisors/Advisors	Weiland, Siep, Promotor Butler, Hans, Promotor
Award date	25 Sept 2019
Place of Publication	Eindhoven
Publisher	Technische Universiteit Eindhoven
Print ISBNs	978-90-386-4836-1
Publication status	Published - 25 Sept 2019

Bibliographical note

Proefschrift

Promotion : time and place

16.00h, Atlas, room 0.710

Access to Document

20190924_MerksFinal published version, 8.31 MB

Cite this

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title = "Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography",

author = "Merks, {Ruben Wouterus Henricus}",

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isbn = "978-90-386-4836-1",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Electrical Engineering",

}

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Y1 - 2019/9/25

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-4836-1

PB - Technische Universiteit Eindhoven

CY - Eindhoven

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