Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

166 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Department of Electrical Engineering
Supervisors/Advisors
  • Weiland, Siep, Promotor
  • Butler, Hans, Promotor
Award date25 Sep 2019
Place of PublicationEindhoven
Publisher
Print ISBNs978-90-386-4836-1
Publication statusPublished - 25 Sep 2019

Bibliographical note

Proefschrift

Promotion : time and place

  • 16.00h, Atlas, room 0.710

Cite this

@phdthesis{268d6621fc1a4937b6298c13ef517c61,
title = "Towards control relevant system design and constrained order controller synthesis: with a thermal control application in immersion lithography",
author = "Merks, {Ruben Wouterus Henricus}",
note = "Proefschrift",
year = "2019",
month = "9",
day = "25",
language = "English",
isbn = "978-90-386-4836-1",
publisher = "Technische Universiteit Eindhoven",
school = "Department of Electrical Engineering",

}

Towards control relevant system design and constrained order controller synthesis : with a thermal control application in immersion lithography. / Merks, Ruben Wouterus Henricus.

Eindhoven : Technische Universiteit Eindhoven, 2019. 257 p.

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

TY - THES

T1 - Towards control relevant system design and constrained order controller synthesis

T2 - with a thermal control application in immersion lithography

AU - Merks, Ruben Wouterus Henricus

N1 - Proefschrift

PY - 2019/9/25

Y1 - 2019/9/25

M3 - Phd Thesis 1 (Research TU/e / Graduation TU/e)

SN - 978-90-386-4836-1

PB - Technische Universiteit Eindhoven

CY - Eindhoven

ER -