Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process

S.A. Starostin; M. Creatore; J.B. Bouwstra; M.C.M. Sanden, van de; H.W. Vries, de

doi:10.1002/ppap.201400194

Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process

S.A. Starostin, M. Creatore, J.B. Bouwstra, M.C.M. Sanden, van de, H.W. Vries, de

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N2/O2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100¿nm thick with a good permeation barrier of ˜1.8¿×¿10-3¿g¿·¿m-2¿·¿day (at 40¿°C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.

Original language	English
Pages (from-to)	545-554
Journal	Plasma Processes and Polymers
Volume	12
Issue number	6
DOIs	https://doi.org/10.1002/ppap.201400194
Publication status	Published - Jun 2015

Keywords

atmospheric pressure glow discharges (APGD)
dielectric barrier discharges
gas diffusion barrier films
roll-to-roll reactors
water-vapour permeability

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10.1002/ppap.201400194

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title = "Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process",

abstract = "An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N2/O2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100¿nm thick with a good permeation barrier of ˜1.8¿×¿10-3¿g¿·¿m-2¿·¿day (at 40¿°C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.",

keywords = "atmospheric pressure glow discharges (APGD), dielectric barrier discharges, gas diffusion barrier films, roll-to-roll reactors, water-vapour permeability",

author = "S.A. Starostin and M. Creatore and J.B. Bouwstra and {Sanden, van de}, M.C.M. and {Vries, de}, H.W.",

year = "2015",

month = jun,

doi = "10.1002/ppap.201400194",

language = "English",

volume = "12",

pages = "545--554",

journal = "Plasma Processes and Polymers",

issn = "1612-8850",

publisher = "Wiley-VCH Verlag",

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T1 - Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process

AU - Starostin, S.A.

AU - Creatore, M.

AU - Bouwstra, J.B.

AU - Sanden, van de, M.C.M.

AU - Vries, de, H.W.

PY - 2015/6

Y1 - 2015/6

N2 - An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N2/O2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100¿nm thick with a good permeation barrier of ˜1.8¿×¿10-3¿g¿·¿m-2¿·¿day (at 40¿°C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.

AB - An atmospheric pressure dielectric barrier discharge (DBD) was applied for the deposition of silica-like moisture barrier films on polyethylene 2,6 naphthalate foil. The diffuse plasma was sustained between two cylindrical drum electrodes in N2/O2/Ar gas flow with the addition of tetraethyl orthosilicate. The chemical composition, morphology and water vapour transmission rate of the moisture permeation barrier layers were studied as a function of the dynamic deposition rate and substrate temperature. It was demonstrated that dense silica-like layers of 100¿nm thick with a good permeation barrier of ˜1.8¿×¿10-3¿g¿·¿m-2¿·¿day (at 40¿°C, 90% RH), corresponding to three orders of magnitude barrier improvement with respect to the pristine polymer, can be deposited in an atmospheric pressure process.

KW - atmospheric pressure glow discharges (APGD)

KW - dielectric barrier discharges

KW - gas diffusion barrier films

KW - roll-to-roll reactors

KW - water-vapour permeability

U2 - 10.1002/ppap.201400194

DO - 10.1002/ppap.201400194

M3 - Article

SN - 1612-8850

VL - 12

SP - 545

EP - 554

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - 6

ER -

Toward roll-to-roll deposition of high quality moisture barrier films on polymers by atomospheric pressure plasma assisted process

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Keywords

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