Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry

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Abstract

No abstract.

Original language	English
Title of host publication	Frontiers in Low Temperature Plasma Diagnostics III : book of papers
Place of Publication	Lausanne, Switzerland
Publisher	Ecole Polytechnique Fédérale de Lausanne
Pages	131-133
Publication status	Published - 1999

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title = "Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry",

abstract = "No abstract.",

author = "J.C. Cigal and G.M.W. Kroesen",

year = "1999",

language = "English",

pages = "131--133",

booktitle = "Frontiers in Low Temperature Plasma Diagnostics III : book of papers",

publisher = "Ecole Polytechnique F{\'e}d{\'e}rale de Lausanne",

}

TY - CHAP

T1 - Toward a fully monitored Fourier transform infrared spectroscopic ellipsometry

AU - Cigal, J.C.

AU - Kroesen, G.M.W.

PY - 1999

Y1 - 1999

N2 - No abstract.

AB - No abstract.

M3 - Chapter

SP - 131

EP - 133

BT - Frontiers in Low Temperature Plasma Diagnostics III : book of papers

PB - Ecole Polytechnique Fédérale de Lausanne

CY - Lausanne, Switzerland

ER -