Time-resolved radical measurements in a remote silane plasma using the cavity ringdown absorption technique

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings
Publication status	Published - 2001

Cite this

@inproceedings{804dfa7df32b4521a53f13febeb46f36,

title = "Time-resolved radical measurements in a remote silane plasma using the cavity ringdown absorption technique",

author = "J.P.M. Hoefnagels and A.A.E. Stevens and W.M.M. Kessels and D.C. Schram and {Sanden, van de}, M.C.M.",

year = "2001",

language = "English",

booktitle = "AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings",

}

AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings. 2001.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Time-resolved radical measurements in a remote silane plasma using the cavity ringdown absorption technique

AU - Hoefnagels, J.P.M.

AU - Stevens, A.A.E.

AU - Kessels, W.M.M.

AU - Schram, D.C.

AU - Sanden, van de, M.C.M.

PY - 2001

Y1 - 2001

M3 - Conference contribution

BT - AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings

ER -