Original language | English |
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Title of host publication | AVS, American Vacuum Society : 48th international symposium, San Francisco, October 28-November 2, 2001 : virtual proceedings |
Publication status | Published - 2001 |
Time-resolved radical measurements in a remote silane plasma using the cavity ringdown absorption technique
J.P.M. Hoefnagels, A.A.E. Stevens, W.M.M. Kessels, D.C. Schram, M.C.M. Sanden, van de
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic