Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals

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Original languageEnglish
Title of host publicationProceedings of the 16th International Symposium on Plasma Chemistry
EditorsR. d'Agostino
Place of PublicationWeinheim
PublisherWiley-VCH Verlag
Number of pages5
ISBN (Print)3527404872
Publication statusPublished - 2003
Event16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy - Taormina, Italy
Duration: 22 Jun 200327 Jun 2003

Conference

Conference16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy
Abbreviated titleISPC 16
CountryItaly
CityTaormina
Period22/06/0327/06/03

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