Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals

J.P.M. Hoefnagels; Y. Barrell; W.M.M. Kessels; M.C.M. Sanden, van de

Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals

J.P.M. Hoefnagels, Y. Barrell, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 16th International Symposium on Plasma Chemistry
Editors	R. d'Agostino
Place of Publication	Weinheim
Publisher	Wiley-VCH Verlag
Number of pages	5
ISBN (Print)	3527404872
Publication status	Published - 2003
Event	16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy - Taormina, Italy Duration: 22 Jun 2003 → 27 Jun 2003

Conference

Conference	16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy
Abbreviated title	ISPC 16
Country/Territory	Italy
City	Taormina
Period	22/06/03 → 27/06/03

Cite this

@inproceedings{2ae3dadb4203447da3bcb8e78d244808,

title = "Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals",

author = "J.P.M. Hoefnagels and Y. Barrell and W.M.M. Kessels and {Sanden, van de}, M.C.M.",

year = "2003",

language = "English",

isbn = "3527404872",

editor = "R. d'Agostino",

booktitle = "Proceedings of the 16th International Symposium on Plasma Chemistry",

publisher = "Wiley-VCH Verlag",

address = "Germany",

note = "16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy, ISPC 16 ; Conference date: 22-06-2003 Through 27-06-2003",

}

Hoefnagels, JPM, Barrell, Y, Kessels, WMM & Sanden, van de, MCM 2003, Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals. in R d'Agostino (ed.), Proceedings of the 16th International Symposium on Plasma Chemistry. Wiley-VCH Verlag, Weinheim, 16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy, Taormina, Italy, 22/06/03.

Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals. / Hoefnagels, J.P.M.; Barrell, Y.; Kessels, W.M.M. et al.

Proceedings of the 16th International Symposium on Plasma Chemistry. ed. / R. d'Agostino. Weinheim : Wiley-VCH Verlag, 2003.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Time-resolved cavity ring-down spectroscopic study of the surface reactivity of Si and SiH3 plasma radicals

AU - Hoefnagels, J.P.M.

AU - Barrell, Y.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

PY - 2003

Y1 - 2003

M3 - Conference contribution

SN - 3527404872

BT - Proceedings of the 16th International Symposium on Plasma Chemistry

A2 - d'Agostino, R.

PB - Wiley-VCH Verlag

CY - Weinheim

T2 - 16th International Symposium on Plasma Chemistry (ISPC 16), June 22-27, 2003, Taormina, Italy

Y2 - 22 June 2003 through 27 June 2003

ER -