Time-dependent mechanics in metal-MEMS

L.I.J.C. Bergers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

No abstract
Original languageEnglish
Title of host publicationPhysics@FOM Veldhoven, 19-20 January 2010, Veldhoven, The Netherlands
EditorsM. Graef, de, G. Zegers, E. Min, F. Pavert, van de
Place of PublicationUtrecht
PublisherFOM: Stichting Fundamenteel onderzoek der Materie
PagesP05.19-188
Publication statusPublished - 2010

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