Three generations of stage control and architecture

H. Butler

Three generations of stage control and architecture

Control Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany
Place of Publication	Bremen, Germany
Pages	153-156
Publication status	Published - 2007
Event	7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007) - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 Conference number: 7

Conference

Conference	7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007)
Abbreviated title	EUSPEN 2007
Country	Germany
City	Bremen
Period	20/05/07 → 24/05/07

Cite this

@inproceedings{f9315b63b20340e0afc515097678e488,

title = "Three generations of stage control and architecture",

author = "H. Butler",

year = "2007",

language = "English",

pages = "153--156",

booktitle = "Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany",

note = "7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007), EUSPEN 2007 ; Conference date: 20-05-2007 Through 24-05-2007",

}

Butler, H 2007, Three generations of stage control and architecture. in Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany. Bremen, Germany, pp. 153-156, 7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007), Bremen, Germany, 20/05/07.

Three generations of stage control and architecture. / Butler, H.

Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany. Bremen, Germany, 2007. p. 153-156.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Three generations of stage control and architecture

AU - Butler, H.

N1 - Conference code: 7

PY - 2007

Y1 - 2007

M3 - Conference contribution

SP - 153

EP - 156

BT - Proceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany

CY - Bremen, Germany

T2 - 7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007)

Y2 - 20 May 2007 through 24 May 2007

ER -