Three generations of stage control and architecture

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 7th Conference of the European sociaty for Precision Engineering and Nanotechnology (EUSPEN 2007), May 20th - May 24th 2007, Bremen, Germany
Place of PublicationBremen, Germany
Pages153-156
Publication statusPublished - 2007
Event7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007) - Bremen, Germany
Duration: 20 May 200724 May 2007
Conference number: 7

Conference

Conference7th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2007)
Abbreviated titleEUSPEN 2007
CountryGermany
CityBremen
Period20/05/0724/05/07

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