Abstract
Ionenstrahl‐Techniken und deren Kombination mit der Elektronenmikroskopie machen Materialfehler in nanometerdünnen Schichten sichtbar.
Translated title of the contribution | Three-dimentional material analyses in the field of nanometry |
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Original language | German |
Pages (from-to) | 50-52 |
Number of pages | 3 |
Journal | Nachrichten aus der Chemie |
Volume | 57 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Jan 2009 |
Externally published | Yes |