Dreidimensionale material-analysen im nanometerbereich

Translated title of the contribution: Three-dimentional material analyses in the field of nanometry

Marcel Verheijen, Robbert Weemaes, Monja Kaiser, Petra Krystek

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

Ionenstrahl‐Techniken und deren Kombination mit der Elektronenmikroskopie machen Materialfehler in nanometerdünnen Schichten sichtbar.
Translated title of the contributionThree-dimentional material analyses in the field of nanometry
Original languageGerman
Pages (from-to)50-52
Number of pages3
JournalNachrichten aus der Chemie
Volume57
Issue number1
DOIs
Publication statusPublished - 1 Jan 2009
Externally publishedYes

Cite this