Abstract
Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.
Original language | English |
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Pages (from-to) | 697-710 |
Journal | Micromachines |
Volume | 5 |
Issue number | 3 |
DOIs | |
Publication status | Published - Sep 2014 |
Keywords
- flexure
- femtosecond laser
- three-dimensional micromachining
- cross-spring pivot
- optomechanics
- Hoecken (Hoekens) linkage