Three-dimensional glass monolithic micro-flexure fabricated by femtosecond laser exposure and chemical etching

V. Tielen, Y. Bellouard

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Abstract

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.
Original languageEnglish
Pages (from-to)697-710
JournalMicromachines
Volume5
Issue number3
DOIs
Publication statusPublished - Sep 2014

Keywords

  • flexure
  • femtosecond laser
  • three-dimensional micromachining
  • cross-spring pivot
  • optomechanics
  • Hoecken (Hoekens) linkage

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