Thomson scattering experiments on a 100 MHz inductively coupled plasma calibrated by Raman scattering

J.M. de Regt, R.A.H. Engeln, F.P.J. de Groote, J.J.A.M. Mullen, van der, D.C. Schram

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Abstract

A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measuredRayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature
Original languageEnglish
Pages (from-to)3228-3233
JournalReview of Scientific Instruments
Volume66
Issue number5
DOIs
Publication statusPublished - 1995

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