Thermal plasma source of hydrogen atoms and ions

M.J. Graaf, de; R P Dahiya; J.L. Jauberteau; F.J. Hoog, de; M.J.F. Sande, van de; D.C. Schram

Thermal plasma source of hydrogen atoms and ions

M.J. Graaf, de, R P Dahiya, J.L. Jauberteau, F.J. Hoog, de, M.J.F. Sande, van de, D.C. Schram

Plasma & Materials Processing

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Abstract

A cascade arc is used as a source for a H/Ar particle beam. The plasma is produced at thermal plasma conditions at 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extd. ions are discussed. Mol. processes as charge exchange and dissociative recombination appear to be important. [on SciFinder (R)]

Original language	English
Pages (from-to)	387-392
Journal	Journal de Physique. Colloque
Volume	51
Issue number	C5
Publication status	Published - 1990

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title = "Thermal plasma source of hydrogen atoms and ions",

abstract = "A cascade arc is used as a source for a H/Ar particle beam. The plasma is produced at thermal plasma conditions at 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extd. ions are discussed. Mol. processes as charge exchange and dissociative recombination appear to be important. [on SciFinder (R)]",

author = "\{Graaf, de\}, M.J. and Dahiya, \{R P\} and J.L. Jauberteau and \{Hoog, de\}, F.J. and \{Sande, van de\}, M.J.F. and D.C. Schram",

year = "1990",

language = "English",

volume = "51",

pages = "387--392",

journal = "Journal de Physique. Colloque",

issn = "0449-1947",

publisher = "EDP Sciences",

number = "C5",

}

TY - JOUR

T1 - Thermal plasma source of hydrogen atoms and ions

AU - Graaf, de, M.J.

AU - Dahiya, R P

AU - Jauberteau, J.L.

AU - Hoog, de, F.J.

AU - Sande, van de, M.J.F.

AU - Schram, D.C.

PY - 1990

Y1 - 1990

N2 - A cascade arc is used as a source for a H/Ar particle beam. The plasma is produced at thermal plasma conditions at 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extd. ions are discussed. Mol. processes as charge exchange and dissociative recombination appear to be important. [on SciFinder (R)]

AB - A cascade arc is used as a source for a H/Ar particle beam. The plasma is produced at thermal plasma conditions at 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extd. ions are discussed. Mol. processes as charge exchange and dissociative recombination appear to be important. [on SciFinder (R)]

M3 - Article

SN - 0449-1947

VL - 51

SP - 387

EP - 392

JO - Journal de Physique. Colloque

JF - Journal de Physique. Colloque

IS - C5

ER -

Thermal plasma source of hydrogen atoms and ions

Abstract

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