Thermal plasma source of hydrogen atoms and ions

M.J. Graaf, de, R P Dahiya, J.L. Jauberteau, F.J. Hoog, de, M.J.F. Sande, van de, D.C. Schram

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A cascade arc is used as a source for a H/Ar particle beam. The plasma is produced at thermal plasma conditions at 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extd. ions are discussed. Mol. processes as charge exchange and dissociative recombination appear to be important. [on SciFinder (R)]
Original languageEnglish
Pages (from-to)387-392
JournalJournal de Physique. Colloque
Issue numberC5
Publication statusPublished - 1990


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