Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films

Xi Wang, Y.J. Bellouard, Z. Xue, J.J. Vlassak

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional thermal model to simulate the crystallization process when a laser beam is swept across an amorphous NiTi thin film. Experimental crystallite nucleation and growth rates are included in the model to enable prediction of the size of the crystallized region as a function of laser annealing parameters. The model can also be used to study the crystallization of other material systems by means of laser annealing.
Original languageEnglish
Pages (from-to)689-694
JournalApplied Physics A: Materials Science & Processing
Volume90
Issue number4
DOIs
Publication statusPublished - 2008

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Amorphous films
Crystallization
Annealing
Thin films
Lasers
Shape memory effect
MEMS
Laser beams
Nucleation
Actuators
Fabrication
Hot Temperature

Cite this

Wang, Xi ; Bellouard, Y.J. ; Xue, Z. ; Vlassak, J.J. / Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films. In: Applied Physics A: Materials Science & Processing. 2008 ; Vol. 90, No. 4. pp. 689-694.
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Thermal modeling of laser-annealing-induced crystallization of amorphous NiTi thin films. / Wang, Xi; Bellouard, Y.J.; Xue, Z.; Vlassak, J.J.

In: Applied Physics A: Materials Science & Processing, Vol. 90, No. 4, 2008, p. 689-694.

Research output: Contribution to journalArticleAcademicpeer-review

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AB - Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional thermal model to simulate the crystallization process when a laser beam is swept across an amorphous NiTi thin film. Experimental crystallite nucleation and growth rates are included in the model to enable prediction of the size of the crystallized region as a function of laser annealing parameters. The model can also be used to study the crystallization of other material systems by means of laser annealing.

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