@inbook{8b07ba0b3cb647af93ed551a38077bf6,
title = "Thermal discharges: experiments and diagnostics",
abstract = "In plasma processing commonly a distinction is made between low pressure (or low (ion) temperature) plasmas and thermal plasmas1. The transition between these two classes is gradual. Plasmas cover a wide spectrum in electron density(10 15/m3 — 10 23/m3) and ionization degree (10-7—1). In low pressure plasmas2 as RF—discharges the ionization degree is usually small and these plasmas are characterized by an abundance of molecular fragments and large ambipolar fields. The high electron density thermal plasmas have a high ionization degree and nearly full dissociation and a high heavy particle temperature. In this paper we will focuss on these plasmas.",
author = "D.C. Schram and D.A. Benoij and J.J. Beulens and F.H.A.G. Fey and {Graaf, de}, M.J. and G.J. Meeusen and R.F.G. Meulenbroeks and {Mullen, van der}, J.J.A.M. and {Regt, de}, J.M. and {Sanden, van de}, M.C.M. and Z. Qing",
year = "1993",
language = "English",
isbn = "0-306-44355-4",
series = "NATO ASI series. Series B: Physics",
publisher = "Plenum Press",
pages = "247--267",
editor = "C.M. Ferreira and M. Moisan",
booktitle = "Microwave Discharges: Fundamentals and Applications",
address = "United States",
}