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Dive into the research topics of 'Thermal and Remote Plasma ALD of Ru from CpRu(CO)2Et and O2'. Together they form a unique fingerprint.- Sort by
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Thermal and Remote Plasma ALD of Ru from CpRu(CO)2Et and O2
- N. Leick
- , R.O.F. Verkuijlen
- , E. Langereis
- , S.A. Rushworth
- , F. Roozeboom
- , M.C.M. Sanden, van de
- , W.M.M. Kessels
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
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