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Dive into the research topics of 'Thermal and plasma enhanced atomic layer deposition of Al2O3on GaAs substrates'. Together they form a unique fingerprint.- Sort by
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S. Sioncke, A. Delabie, G. Brammertz, T. Conard, A. Franquet, M. Caymax, A.J. Urbanczyk, M.M. Heyns, M. Meuris, J.L. Hemmen, van, W. Keuning, W.M.M. Kessels
Research output: Contribution to journal › Article › Academic › peer-review