Abstract
The formation of the impurity phase in materials containing nanopores is investigated theoretically. The formation of impurity clusters on the inner surface of pores is studied using the thermodynamic approach. The most advantageous states of metal impurities in silicon are determined, and comparison with available experimental data is carried out. The possibility of the formation of cobalt nanoclusters in subsurface cavities in copper is substantiated theoretically.
| Original language | English |
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| Pages (from-to) | 42-49 |
| Number of pages | 8 |
| Journal | Technical Physics |
| Volume | 58 |
| DOIs | |
| Publication status | Published - 2013 |