The transient behaviour of power pulsed low pressure microwave plasmas

S. Hübner, E.A.D. Carbone, J.M. Palomares, J.J.A.M. Mullen, van der

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Abstract

Pulsed microwave discharges at low pressure were investigated using time resolved Thomson scattering. The response of the electron density and temperature on power pulsing is investigated for different working gases, such as pure Ar and Ar admixtures with N2, and O2.
Original languageEnglish
Title of host publicationProceedings of the IXth Workshop on Frontiers in Low Temperature Plasma Diagnostics 2011 (FLTPD IX), 9-12 May, 2011, Zinnowitz, Germany
Publication statusPublished - 2011
Event9th Workshop on Frontiers in Low Temperature Plasma Diagnostics (FLTPD IX), May 9-12, 2011, Zinnowitz, Germany - Hotel Baltic, Zinnowitz, Germany
Duration: 9 May 201112 May 2011
http://www.frontiers2011.org/

Workshop

Workshop9th Workshop on Frontiers in Low Temperature Plasma Diagnostics (FLTPD IX), May 9-12, 2011, Zinnowitz, Germany
Abbreviated titleFLTPD IX
Country/TerritoryGermany
CityZinnowitz
Period9/05/1112/05/11
OtherIX Workshop on Frontiers in Low Temperature Plasma Diagnostics
Internet address

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